Reliability of Poly-Si and IGZO TFTs
A tutorial presented by:
Ryoichi Ishihara
Delft University of Technology Feldmannweg 17, 2628 CT Delft, The Netherlands tel: +31-15-2788498 r.ishihara@tudelft.nl Abstract: Low-temperature processed polycrystalline-silicon (LTPS) TFTs are currently the only technology that can produce high-resolution active-matrix liquid-crystal displays (AM-LCDs) and AM-organic light-emitting diode (OLED) displays as it can provide much higher mobilities than those of amorphous-Si. In the future, poly-Si is expected to realize high-density threedimensional NAND flash memor
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